Analysis of defect capture cross sections using non-radiative multiphonon-assisted trapping model

نویسندگان

  • Davide Garetto
  • Yoann Mamy Randriamihaja
  • Alban Zaka
  • Denis Rideau
  • Alexandre Schmid
  • Hervé Jaouen
  • Yusuf Leblebici
چکیده

0038-1101/$ see front matter 2011 Elsevier Ltd. A doi:10.1016/j.sse.2011.10.024 ⇑ Corresponding author at: IBM Systems and Techn Monnet, Crolles, France. E-mail address: [email protected] (D. Gare A multiphonon-assisted model included in a Poisson–Schroedinger solver has been applied to the calculation of the capture/emission trapping rates of CMOS oxide interface defects. The dependencies of trap capture cross-sections with trap energy, depth, applied bias and temperature have been extracted, with the purpose of evaluating the accuracy of constant cross-section models adopted in compact and empirical approaches. The model has been applied to the extraction of interface trap concentrations and to the accurate AC analysis of the trap frequency response. 2011 Elsevier Ltd. All rights reserved.

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تاریخ انتشار 2012